In order to fully realize the establishment and application of white light interferometry system,the software system was designed and developed on the basis of the hardware structure.The graphic programming language LabVIEW was used as the development tool.The communications with motion controller and data acquisition instrument were established to realize the coordination control of five motion axes and real-time data acquisition and analysis processing through.NET control and ActiveX control,respectively.Finally,through the test of the standard ring gauge,it is verified that using the software,not only the test task of the white light interferometry system can be completed accurately and efficiently,but also the output point cloud data can be further processed to obtain the geometric tolerance information such as diameter and cylindricity.