In order to achieve the goal of high-speed and high-precision machining of industrial manipulator,a trajectory planning method based on decomposition interpolation and controllable corner smoothing was proposed.The problems existing in the joint coordinate system interpolation of industrial manipulator were studied,and the necessity of trajectory interpolation in workpiece coordinate system was analyzed.Then,a workpiece coordinate interpolation method based on decomposition method was proposed.The position command was decomposed into Cartesian coordinates and the attitude command was decomposed into spherical coordinates to realize trajectory interpolation in the workspace and high-precision linear trajectory was generated.A new kinematic controllable corner smoothing strategy was proposed to generate a smooth trajectory by using a 3-segment constant acceleration curve at the corner of the joint space,the resulting corner error could be controlled by changing the corner duration.Finally,a multi-stage tool path test was carried out on a 6DOF manipulator.The research results show that the proposed method can effectively realize the linear motion of the tool within 3.886 s with an error of 0.01 mm,and generate a smooth trajectory at each corner within the self-defined tolerance of 0.5 mm,thus realizing the high-speed and high-precision machining of the manipulator.