Abstract:The static analysis of machine tool was conducted in finite element analysis (FEA)software ANSYS Workbench, and a preliminary understanding of deformation of machine was obtained. According the deformation, a flexible-rigid coupling virtual prototype was established in dynamics analysis software ADAMS by making deformable and vibration-prone components flexible. Torch's movement in different forms such as translational, acceleration and deceleration and high-speed movement were simulated in the virtual prototype, the condition of slider and screw's deformation and vibration was studied with analysis, and the circular path's difference between the rigid model and rigid-flexible coupling model was compared. The results show that the rigid-flexible coupling virtual prototype can be more realistic precise in kinematics and dynamics analysis, which has important significance for machine design, improvement and error compensation.