Simulation and Dynamic Characteristic Optimization of the Ultraprecision Stage with Airbearing
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文明,姚勇,何康昊,陈华明,杨雷,邓立,李佩龙,姜飞.精密气浮工作台动态特性仿真与优化[J].机床与液压,2017,45(2):20-24. . Simulation and Dynamic Characteristic Optimization of the Ultraprecision Stage with Airbearing[J]. Machine Tool & Hydraulics,2017,45(2):20-24