The machine tool is developing towards high-speed and highprecise. Solving more friction heat and larger thermal deformations under highspeed movements becomes the breakthrough of machine tool development, so that hollow ball screw with cooling system is occurred to supress heat and to control thermal deformation. The friction heat and thermal boundary conditions of bearing and nut were calculated respectively theoretically, then the analysis of heat conduction under different loads and different rotations of solid/hollow ball screw were preceded with ANSYS, after that, the deformation analysis of servo feed system was followed. The complete simulation shows that the hollow ball screw with coolant giving system can have a better control of heat and thermal deformations than the solid one. The results can provide theoretical basis of the design and study of hollow ball screw.