In order to improve the output performance of piezoelectric pump, two types of threechamber parallel piezoelectric pump with valves were designed. Umbrellashaped passive check valves were used in the piezoelectric pumps. The structures of the piezoelectric pump were designed by linear type and stacking type respectively, and the piezoelectric pump volume of the stacking type pump was 0.85 times that of the linear type. Water and air were selected as the medium, the output performance experiments of the two types piezoelectric pumps were carried out respectively. The experimental results show that the phase difference of sinusoidal AC signal used to driving the piezoelectric vibrators has a great influence on the output performance of the threechamber parallel pump, and the output performance of the pump can be improved by choosing a reasonable driving mode. Under the same conditions, the output performance of the linear type threechamber parallel piezoelectric pump is slightly better than that of the stacking type. Under the driving of 80 V sinusoidal alternating current, the operating frequency of the linear type threechamber parallel piezoelectric pump is less than 400 Hz, the maximum output gas flowrate can reach 1 236 mL/min, and the output liquid flowrate can reach 714 mL/min.