Reliability analysis of high-precision CNC machine tools can quickly solve the problem of CNC machine tool failure.In order to improve the accuracy of reliability analysis of high-precision CNC machine tools,a reliability analysis method of high-precision CNC machine tools based on RBF neural network was designed.Using the multi-body system model,the NC machine tool was modeled,the internal characteristics of the machine tool were extracted,the fault data were classified and processed,and the fault data distribution fitting was completed.On this basis,the reliability evaluation index of CNC machine tool was established,and the RBF neural network was trained to realize the reliability analysis of high-precision CNC machine tool.The experimental results show that the positioning error of the proposed reliability analysis method for high-precision CNC machine tools is small,and the failure mode frequency of CNC machine tools can be accurately counted,which ensures the reliability analysis effect and improves the reliability analysis accuracy of CNC machine tools.