The time grating displacement sensor mainly adopts the wire cutting technology to complete the tooth and slot on the stator and rotor. Machining accuracy of wire cutting is limited by many factors such as the machine tool precision, realtime compensation capability of the molybdenum wire and the purity of the cutting fluid. Therefore, the final accuracy of sensor is affected by the accuracy of the tooth and slot to some extent. To overcome the problem of unequal cogging in the mechanical processing, the time grating displacement sensor which uses precise gear shaping technology is proposed in this paper. The analysis of accuracy effect on equal cogging to the time grating displacement sensor is carried out by conducting the comparative test and accuracy experiments of equal cogging. The experimental results show that the consistent of the error curve in a pair of poles of the sensor using gear shaping technology is getting better and the error value is reduced by about 20% as compared with that of wire cutting under the same conditions.
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王阳阳,张兴红,毛阿敏,李志明,王斌.齿槽等分性对时栅位移传感器的精度影响分析[J].机床与液压,2016,44(24):22-26. . Analysis of accuracy influence about equal cogging to the time grating displacement sensor[J]. Machine Tool & Hydraulics,2016,44(24):22-26