Abstract:Magnetic shape memory alloys (MSMA) is a new type of shape memory alloys. The actuator made with MSMA has the advantages of fast speed, high frequency, big controlled displacement, memory function etc, and is particularly suitable for high precision motion and position control. The high frequency servo valve actuator based on MSMA was researched, and a new type of actuator structure was designed: spring was used to recover deformation, DC coils was used to produce bias magnetic field, the field coils was used to provide controllable magnetic field. The material static characteristic was analyzed through existing data, electromagnetic simulation was made through ANSYS software. Finally the relationship between driving force and deformation is gotten, the rationality of the structure design is validated.