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一种位移放大微动平台的设计和特性分析
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国家自然科学基金资助项目(51265016)


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    摘要:

    为了增大微动平台的工作行程,设计一种新型位移放大机构,并对其静态和动态特性进行分析。采用杠杆原理设计一种新型的二级微位移放大机构。采用有限元软件ANSYS对机构的柔度和放大倍数进行分析,分析结果表明所设计的平台能放大y方向位移,放大倍数为8.81,而在x和z方向位移较小。对机构进行灵敏度分析表明该机构在x、y方向的位移灵敏度分别为0.86 μm/μm、8.82 μm/μm,说明机构在放大y方向的位移反应较灵敏。对机构进行模态分析,从振型可以看出该机构能实现运动方向为x和y方向平动,但在x方向的位移较小,并且预应力对机构的固有频率影响较小。研究结果表明,所设计的机构具有较大的工作空间和较高的灵敏度。

    Abstract:

    In order to improve the work range of a micro-stage, a novel displacement amplification mechanism was designed, and its static and dynamic characteristics were analyzed. The novel two-level micro-displacement amplification mechanism was designed by using the level principle. The finite element software ANSYS was used to analyze its flexibility and magnification characteristics. The analysis results show that the designed stage can amplify y direction displacement and the amplification ratio is 8.81, while the displacements in the x and z directions are small. The results of the sensitivity analysis of the mechanism shows that the displacement sensitivity for x and y direction is 0.86, 8.82 respectively, and it illustrates the stage is sensitive in y direction. The modal analysis of the mechanism was carried out, the and plane movement of the stage could be realized by seen from the mode shapes, but the displacement in x direction was smaller, and the prestress had a small effect on the natural frequency of the mechanism. The study results show that the designed mechanism has larger workspace and higher sensitivity. 

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李会文,吴晖辉,胡俊峰.一种位移放大微动平台的设计和特性分析[J].机床与液压,2014,42(15):101-103.
.[J]. Machine Tool & Hydraulics,2014,42(15):101-103

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  • 在线发布日期: 2015-01-28
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