Ultra precision machining technique and equipment have developed greatly in recent years. Ultra precision hydrostatic bearing component is a key common component of ultraprecision processing equipment. The structure characteristics, technical properties and application situation of hydrostatic/aerostatic bearing spindle, guideway and rotary table were introduced roundly. A typical ultraprecision machine tool was taken as an example to present the application of the ultra precision hydrostatic/aerostatic bearing spindle, guideway and rotary table.