In order to achieve precise control of the flow, using the piezoelectric ceramic inverse piezoelectric effect to drive spool movement, the threedimensional (3D) model of piezoelectric ceramics driven precision flow valve and flow field inside was established. The flow field characteristics of the valve inside was analyzed by using Fluent software to make internal pressure field, the distribution of the velocity field and traces the laws of the fluid inside the valve steady state. The analysis results show that the valve orifice of the pressure loss is large, and the local negative pressure is formed. Fluid velocity where maximum, and flows in the jet stream in the form to lowpressure chamber, and the valve spool and contact points should be used of antierosion and high strength material. A valve at the outlet is rounded in treatment, which can effectively eliminate the negative pressure and make the fluid traces in stability.