Based on the special physical properties of Hetian sapphire, by using Corundum drilll and high -speed steel twist drill, Hetian sapphire's drilling experiment was carried out under the condition of additional ultrasonic vibration and without additional ultrasonic vibration. Comparative analysis was conducted on three aspects of tool workpiece damage, exit burr and micro quality of inner surface of hole, better processing quality and efficiency could be obtained by the ultrasonic vibration drilling. The wear and damage of the tool can be reduced, which provides a new method for deep hole processing technology for precision machining of Hetian sapphire.