To reduce or eliminate the Abbe error of 3D linear probe,and to diminish effects of the kinematic error of rail on the uncertainty of measurement,a 3D linear probe which conformed as closely as possible to the Abbe principle in its 3D directions was developed.The probe moved in three dimensions,and the coplanar structures were used in the horizontal and vertical rails.The measuring line of the 3D measuring system was orthogonal at one point,and the orthogonal point coincided with the center of the probe.The measuring lines in the horizontal and vertical directions of the measuring system were coplanar with the vertical and horizontal guide rail surfaces,respectively.According to the characteristics of the probe and based on the conventional probe error analysis,effects of the errors in the probe were analyzed in detail,and the main error sources affecting the uncertainty of measurement were investigated,and the correction method for these errors was presented.