To solve the problems consisted of big axial force and torque, poor chip breaking and chip removing, cutting tools abrasion easily of micro deep hole drilling, the drill thrust and chip breaking mechanism of ultrasonic vibration drilling are analyzed by building the axial vibration drilling motion mathematical model. The conventional drilling and ultrasonic vibration drilling micro deep hole machining experiments of 0Cr17Ni4Cu4Nb stainless steel were tested by using the designed ultrasonic axial vibration drilling experimental device. And the axial force, torque and chip shape were analyzed by comparison. The experimental results indicate that compared with the conventional drilling, in the ultrasonic vibration drilling process, the axial force and torque are reduced, the excellent effects of chip breaking and chip removing are obtained, the stability of drilling process is increased, and service life of the tool is prolonged.