In view of series of problems such as scratches,white spots,steps and not swept through presented in the process of curved glass screen scanning,based on the structure,working principle and field reaction of the scanning machine,the main factors led to the low yield were analyzed.The structure optimization of the disc was carried out.At the same time,the numerical analysis results of the upper disk before and after optimization were compared.It is shown that：the maximum deformation of the upper plate is reduced from 0014 4 mm to 0008 0 mm,and the force deformation of the curved glass screen is very smooth.The new plate can improve sweep disc condition flatness.And the new vacuum plate processing technology have improved.So the process complexity is reduced,the processing cost is decreased.The data of the scanning experiment show the yield rate can be improved to some extent with the new upper plate structure.