Macro/micro dual drive micro cutting positioning and feeding system is widely used in aerospace, medical, nuclear power and IC manufacturing and other fields. Its positioning and feeding precision is the fundamental to ensure the quality of machining parts. A progressive error compensation method combining mechanical compensation with algorithm compensation was proposed: firstly, the error compensation of macro platform in mechanical way was realized by the piezoelectric actuating characteristics of micro platform element; then, the leastsquare method and the BP neural network error compensation model were used to compensate the precision error of the macro/micro dual drive system. Through error compensation experiment, the conclusion is obtained as follows: under the condition of micro cutting, the progressive error compensation method for macro/micro dual drive positioning and feeding system greatly improves the positioning accuracy of the machine tools; after compensation, the error range of X and Y axes is mainly distributed between［-0.010,+0.010］μm; the positioning accuracies are 0.006 mm and 0.009 mm and the repeatability accuracy is 0.010 mm and 0.013 mm, respectively. All of these make the system meet the requirements of the nm level positioning accuracy and 10 nm level repeat positioning accuracy.