Building “PC+motion controller+stepper motor” embedded tool measuring instrument control system, the tool measuring instrument motion control system was studied.The overall framework and control algorithm of the control system were analyzed.In the X, Y axis motion modules, the guide rail, slider and guide rail pair were adopted;the Z axis movement was realized by stepping motor and ball screw structure,CCD digital camera was adopted in the vision module to capture the image signal;the Googol GTS series motion control card was adopted in the control system.The host computer control software drove each axis stepping motor through motion control card.The expected trajectory planning was completed by using improved PID control and Stype speed planning method.