Finite element analysis method(FEM) is introduced in the design of the cam rotor motors, and its stator is analyzed and designed. The structural optimization method of the stator was elaborated based on the NX80CAE advanced simulation module. After the parametric model of the stator and FEM model built, the analysis was done focusing on the optimization of the stator vane〖JP〗 groove angle position. Based on the results of the analysis, a reasonable structural design parameters of the stator vane groove angle position was given, which would largely reduce the amount of deformation of the motor stator when it working. The result obtained provides the basis for the structural optimization of the stator of the cam-rotor vane servo motor. The structural optimized stator is successfully applied to the cam-rotor vane servo motor and the relative performances of the servo motor are achieved in the related experiment.