Analyzing the structure and working principle of the micro diaphragm pump, the overall simulation model of the cam diaphragm pump is established by the AMESim platform. Considering the important influence of the transmission mechanism on the working performance of the pump, the core parameters were carried out simulation of the outlet pressure, cam speed and maximum stroke. Through analyzing the flow and pressure characteristics curve of the microdiaphragm pump, it is concluded that the reasonable improvement of the cam speed and stroke can improve the working performance of the pump, which provides an important basis for the design and further research of the miniature diaphragm pump.