Flow stability control is an important condition for obtaining stable removal function and achieving deterministic finishing in magnetorheological finishing(MRF) process.In view of the flow disturbance caused by delivery lift change in MRF system with inverted polishing head and centrifugal pump transfer configuration,the method of controlling the flow disturbance error by magnetic flow valve was studied.However, this method has the problem of control response lag due to the measurement integration time of flowmeter.The reason of flow disturbance caused by the head change due to the doubleZ axis followup structure can not inhibit the motion of the wing axis was analyzed.The dual-channel operation control method for Zdirection synchronous drive following multi-axis composite motion was proposed,which essentially solves the problem of the flow disturbance caused by head change of centrifugal pump in the process of magnetorheological finishing, realizes the real-time and high stability flow control, and can control the flow fluctuation within 1%.