In order to improve the stiffness and accuracy stability of the porous aerostatic thrust bearing,the porous aerostatic bearings with different surfaces such as plane and micro concave surfaces were compared and analyzed,which were modeled and simulated by Gambit and Fluent software.The effects of groove depth on bearing capacity and stiffness characteristics of the porous aerostatic thrust bearing were studied taking the plane,1.5 μm and 3 μm groove depths as parameters.A comparative analysis of the simulation and test results shows that the gas film thickness of the aerostatic bearings is 1~20 μm,the bearing capacity and static stiffness are enhanced with the groove depth becoming larger.The precision turning and grinding process have great influence on the stiffness and stability of the micron groove,and the groove shape error is easy to cause the air hammer phenomenon.