Abstract:The aerostatic guide decoupling structure for each axis of the tri-axial vibrator can not only lubricate and guide non-axial movement, but also transfer self-axis motion to tri-axial motion platform (output vibration excitation signal). In order to improve vibration transmission accuracy, firstly the relationship between the axial vibration transmission and working parameters is studied based on a uniaxial equivalent model of the aerostatic guide decoupling structure. Based on calculation and simulation of the gas film characteristics for a partial porous aerostatic guide, such as pressure, load capacity and stiffness, the influence mechanism of the structural and working parameters on vibration transmission rate was obtained. At last, the decoupling structure optimal design and decoupling precision improvement are realized for the tri-axial vibration excitation signal.