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单晶硅表面微纳结构构建及其疏水性能分析
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苏州科技大学科研基金项目(XKZ201604);国家自然科学基金资助项目(51305286)


Construction of micro/nano structure on the surface of monocrystalline silicon and analysis of its hydrophobicity
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    摘要:

    利用去除晶胞的方式在单晶硅100晶面的表面构建不同结构的光栅微纳结构及方柱阵列微纳结构,同时采用MD数值模拟方法,结合疏水结构模型,建立适用于光栅及方柱阵列微纳结构的结构模型,将理论接触角与仿真测量接触角对比并分析,从微观尺度上验证试验结果,得出两种结构参数对表面疏水性能的影响。研究结果表明:在去除一层晶胞的前提下,方柱阵列微纳结构的接触角为131°,其疏水性能更强。而结构参数在CassieBaxter模型条件前提下,疏水性能随着疏水结构间的间距宽度增加而增大,随疏水结构宽度增大而减小。

    Abstract:

    The grating micro/nano structure and square column array micro/nano structure with different structures are constructed on the surface of 100 crystal surfaces by removing the unit cell. At the same time, the Molecular Dynamics (MD) numerical simulation method combined with the hydrophobic structure model is used to establish the structure model suitable for grating and square column array micro/nano structure. The relationship between the theoretical contact angle and the contact angle of the simulation measurement has been compared and analyzed. The experimental results are verified from the micro scale, and the effect of the two structural parameters on the surface hydrophobicity is obtained. The results show that under the premise of removing one cell, the contact angle of the micro and nano structure of the square column array is 131°, and the hydrophobicity of the square column array microstructures is stronger. On the other hand, under the condition of CassieBaxter model, the hydrophobicity increases with the increase of the spacing width of hydrophobic structure, and decreases with the increase of hydrophobic structure width.

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丁雯钰,曹自洋,汪帮富,蒋全胜,王中旺.单晶硅表面微纳结构构建及其疏水性能分析[J].机床与液压,2019,47(24):64-68.
. Construction of micro/nano structure on the surface of monocrystalline silicon and analysis of its hydrophobicity[J]. Machine Tool & Hydraulics,2019,47(24):64-68

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  • 在线发布日期: 2020-03-12
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