Atmospheric pressure plasma arc cleaning is a new surface pretreatment cleaning technology, understanding the energy coupling between plasma arc and workpiece is the key to study this technology. This paper establishes a finite element model, and the regression calculation of the analysis results show the empirical formula of interface cleaning force and interface cleaning temperature, further reveal the influence of main parameters such as plasma arc power, substrate thickness and cleaning speed on energy coupling, and the results of regression analysis were verified. The results show that, the interaction between plasma arc output power and cleaning speed has the most significant effect on interface cleaning force and interface temperature. The plasma arc output power has the greatest influence on interface cleaning force and interface temperature, the cleaning speed is then second, and the substrate thickness has the least influence on them.