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大口径非球面光学元件测量调心调平工作台系统研究
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国家自然科学基金青年科学基金项目(51705546)


Research on Centering and Leveling Worktable System for Large Aperture Aspheric Optical Element Measurement
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    摘要:

    为避免大口径高精度非球面光学元件在进行离线测量时存在位姿误差,提出一种精密调心调平工作台设计方案,解决了非球面镜在离线测量时因装卡不当造成的X、Y、Z方向偏差的问题。通过分析转台与非球面在空间6个自由度上存在的相对位姿误差,并以最小二乘法为基础数学理论、模型参数评估为导向,建立基于最小二乘法的优化模型。结果表明:该模型在校正上述误差源上具有极高的精度,验证了所提出的精密调心调平工作台可作为一个独立附件来改善大口径非球面光学元件的加工与测量环境,提高磨削加工精度。

    Abstract:

    In order to avoid the pose error in offline measurement of the aspheric optical elements with large aperture and high precision,a design scheme of precise centering and leveling worktable was proposed,by which the problem of the deviation in X,Y and Z directions of aspheric mirrors in offline measurement caused by improper clamping was solved.By analyzing the relative pose error between the turntable and the aspheric surface at 6 degrees of freedom in space,and taking the least square method as the basic mathematical theory and the model parameter evaluation as the guide,an optimization model based on the least square method was established.The results show that the model has high accuracy in correcting the above error sources,and the proposed table can be used as an independent accessory to improve the machining and measuring environment of the large aperture aspheric optical elements and improve the grinding accuracy are verified.

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席建普,刘同士.大口径非球面光学元件测量调心调平工作台系统研究[J].机床与液压,2021,49(10):71-75.
XI Jianpu, LIU Tongshi. Research on Centering and Leveling Worktable System for Large Aperture Aspheric Optical Element Measurement[J]. Machine Tool & Hydraulics,2021,49(10):71-75

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  • 在线发布日期: 2023-03-09
  • 出版日期: 2021-05-28