In order to solve the problem of low acceleration precision of piston,a new hybrid actuator control system with advantages of pneumatic and hydraulic technology was proposed.The structure of the electro-hydraulic-pneumatic hybrid actuator system was analyzed,and the mathematical model of the hybrid actuator was established.On the basis of the integral sliding mode controller,combined with the sliding mode disturbance observer with interference suppression and estimating compound disturbance ability,a comprehensive controller of sliding mode disturbance observer-integral sliding mode controller was developed;the MATLAB software was used to simulate the electro-hydraulic-pneumatic hybrid actuator,and the calculation results were compared and analyzed with traditional PID controllers.The results show that by using the electro-hydraulic-pneumatic hybrid actuator system based on sliding mode disturbance observer-integral sliding mode controller,the tracking accuracy for square wave and sinusoidal acceleration signals can be significantly improved,and the square wave response overshoot is reduced by about 54% and the sinusoidal response error is reduced by about 65%;the control system has a strong anti-interference performance and small position tracking error,the piston acceleration can be effectively controlled,and the system has strong robustness.