Abstract:In order to improve the accuracy of the self-developed ultra-precision grinding machine, based on the theory of multi-body system and the principle of homogeneous coordinate transformation, 37 geometric errors were analyzed. A number of geometric error elements of ultra-precision grinders have been calibrated and compensated in the manufacturing stage. The tool setting deviation of the grinding wheel and the contour radius wear deviation of the grinding wheel were taken as the main sources of surface errors. The transfer function to the integrated error was deduced separately, the error identification method was analyzed, the error correction compensation model was established, and the point compensation correction method based on direct compensation was proposed. The test results show that the comprehensive error model established is correct. According to the error identification method and the correction compensation model, the error is significantly reduced, which effectively improves the surface accuracy.