Aiming at the problems of unsatisfactory performance and complicated manufacturing process of fluid driver for soft robot,a high power density flexible pump and its process optimization method were proposed.The flexible pump was composed of cross electrodes,and the flow direction could be controlled according to the polarity of the applied voltage.Then,a simple electrode configuration model was proposed to analyze the electro-hydraulic dynamic phenomenon caused by interdigital electrodes,and finite element analysis was used to optimize the distance between electrodes to maximize the pressure and flow rate per unit length.Finally,a cutting plotter was introduced into the electrode manufacturing process,and an adhesive elastomer was used in the flow channel of the pump,thus a reliable and efficient manufacturing process was realized.The research results show that when the optimal ratio of the distance between electrodes is 3.4,the maximum pressure per unit energy consumption is 118.6 kPa/W,which is consistent with the calculated results of the model.In addition,the pressure error and flow rate error between the pumps with the same configuration are 3.4% and 4.4%,respectively,which verifies the validity of the electrode configuration model and the reliability of the manufacturing process.Compared with other fluid pumps,this pump has higher performance and can work normally even if it bends,which has higher engineering application value in wearable devices and soft robot.