Abstract:The resonance between the ultra-high acceleration macro-micro motion platform base and the voice coil motor can seriously affect the positioning accuracy of the platform.Taking the base as the research object,with the aim of improving the first-order natural frequency of the base and reducing the mass,the methods of modal analysis,topology optimization,direct optimization and response surface optimization were made by using SolidWorks and ANSYS Workbench.The modal mode shape,natural frequency and optimization scheme were obtained,and the finite element analysis were performed on the optimized model again.The results show that the first-order natural frequency of the base increases by 6.8%,and the mass decreases by 8.0%.The first-order natural frequency is improved,and also the base lightweight is realized.