An embedded fast tool servo (FTS)appliance was developed based on the voice coil motor,which had compact structure and high precision,and the finite element simulation was carried out through Workbench.The distribution of stress and strain of the air bearing device was obtained by static analysis,and the maximum deformation and stress of the components were obtained.The natural frequencies and modes of the air bearing device were obtained by modal analysis,and the rationality of the finite element model was verified by modal experiments.The analysis results show that increasing rigid support can increase the natural frequency of the fast tool servo,and it can effectively avoid the “resonance” phenomenon.The design scheme can meet the requirements of large stroke and high stiffness cutting.