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用于三坐标测量机的低成本转角误差测量方法
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内蒙古自治区高等学校科学研究项目(NJZY19355)


Low-cost Angle Error Measurement Method for Coordinate Measuring Machine
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    摘要:

    为以较低成本同时测量2个轴上的2个转角误差,提出一种适用于三坐标测量机或机床的转角误差测量方法。对固定在CMM滑架上的附加载质量对转角误差的影响进行分析及验证。采用干涉型高分辨率角位移传感器实现同时测量CMM滑架的2个转角误差,并且仅需在滑架上固定1个质量较小的平面镜,即可减小CMM滑架上的负载。为验证该方法的正确性,分别测量了2台示例性CMM的2个转角误差,并将所得结果与用标准激光干涉仪测量得到的值进行比较。实验结果表明:所提方法和使用标准干涉仪得到的测量结果之间的最大差值不超过4 μrad,能够以较低成本满足CMM转角误差测量要求。

    Abstract:

    In order to measure two rotation errors on two axes with lower cost, a rotation error measurement method for coordinate measuring machine (CMM) or machine tool was proposed. The influence of additional mass fixed on the CMM carriage on rotation angle error was analyzed and verified. The interferometric highresolution angular displacement sensor was adopted to measure the two rotation angle errors of the CMM carriage at the same time, and the load on the CMM carriage was reduced by fixing only one plane mirror with a small mass on the carriage. In order to verify the correctness of this method, two rotation angle errors of two exemplary CMM were measured, and the results were compared with those measured by standard laser interferometer. The experimental results show that the maximum difference between the proposed method measured results and the measurement results obtained by using the standard interferometer is less than 4 μrad, which can meet the requirements of CMM angle error measurement with low cost.

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张文强,许立磊.用于三坐标测量机的低成本转角误差测量方法[J].机床与液压,2021,49(19):58-62.
ZHANG Wenqiang, XU Lilei. Low-cost Angle Error Measurement Method for Coordinate Measuring Machine[J]. Machine Tool & Hydraulics,2021,49(19):58-62

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  • 在线发布日期: 2023-03-21
  • 出版日期: 2021-10-15