Micro-assembly is the key technology to achieve MEMS device package. By taking the assembly of small parts as a research object, combined with the laboratory precision mobile platform and CCD industrial camera, a hardware system was built based on the USB2831 data acquisition card. With the VC++6.0 as system software development platform, and based on the method of dynamic link library, the vacuum adsorption control system software was prepared. Through assembling of five different shapes of small parts, the assembling accuracy was reached 49 μm. The feasibility of the control system structures is verified, and the control system software is simple and reliable with strong practicability.