Complicated contour error model of curve trajectory and load disturbance would influence the contour accuracy of direct drive xy table driven by permanent magnet linear synchronous motor. The fuzzy neural network sliding mode control with self-learning ability was adopted for single axis to design position controller. The system not only had strong robustness but also weakened the effects of chattering. Between the two axes, the real time contour error calculation algorithm was adopted to built contour error model of xy table. Then cross-coupled control was adopted to design contour controller. The tracking error and contour error were weakened simultaneously. Simulation results show that the effects of chattering almost do not exist and the control system has strong robustness and high contour precision.