Abstract:Fly-cutting with single crystal diamond cutting tool was used for the fabrication of optical microstructure components with nano-surface finish and sub-micron form accuracy without the need for any subsequent post polishing. By experimental fabrication of micro V-groove in ultra precision fly-cutting, the effects of the spindle speed, feed rate, cut depth and cut distance factors affecting machining accuracy of micro V-groove were analyzed, and the cutting parameters were optimized. A micro V-groove array was processed with using of optimized cutting parameters. The experimental results show that the machining of V-groove structures in ultra-precision fly-cutting meets the requirement of the optical microstructure.