Abstract:In order to polishing the complex optical surfaces, a five-axis ultra-precise polishing machine with joint movement of rotary-swing was developed individually. The rotary swing mechanism with joint movement as its key component was optimized in design. By using ANSYS Workbench software, the statics characteristic of the precise swing stage was analyzed; at the same time, the structure of the swing sets was optimized with a target of the minimum distortion during the process of change position-posture of the slider. Based on kinetic analysis method, air bearing rotary stage was simplified reasonably, and modal analysis of the rotating part of turntable was performed by using ABAQUS. The results show that under this circumstance of meeting the bearing load, the optimized institution significantly reduces the amount of maximum deformation, which meets the requirements of precision polishing process.