Abstract:As the friction loss which caused by rubbing frequently between the common output rod of GMM micro-pump and pump cavity wall, affected the sealing of the pump cavity, thus oil leakage is led. In order to solve this problem, a method that a kind of composite flexure hinge replaced of the common output rod is put forward. Finite element modeling and analysis (FEM & FEA) on all kinds of flexure hinge output film were taken. By the result of simulation and theoretical analysis, this composite flexure hinge film has stronger rotation capacity, higher rotation precision, smaller dimension and higher movement sensitivity, thereby reduces the friction between the flexure hinge output film and pump cavity wall. So it can provide theoretical basis for the future design of GMM micro-pump.