As the deformation of aerostatic restrictor is generally in the micro-nano level, it cannot be measured by experiment. On self-designed multi-channel restrictor, temperature effects are studied using ANSYS software. By using fluid solid coupling analysis method, the temperature distribution and deformation of the restrictor were analyzed with simulation when the supply air temperature and ambient temperature were all at 20 ℃, gas supply pressure was (0.2 ~ 0.6) MPa and gas film thickness was 10 μm,20 μm,30 μm and 40 μm. Study results show that by increasing the supply pressure and decreasing the film thickness, the temperature effect is more obvious, and deformation of restrictor is larger caused by decreasing of internal temperature and pressure of the restrictor. Moreover the thermal deformation is bigger than deformation caused by pressure drop. Among which, the maximum deformation is 1.011 6 μm caused by temperature decreasing, and the maximum deformation caused by pressure drop is 0.128 9 μm.