Abstract:SolidWorks and the Workbench of finite element analysis (FEA) software was respectively applied with the modeling of the xy precision positioning platform of wire bonders and static and modal analysis of the key components of the xy precision positioning platform of wire bonders. According to FEA analysis results, a new solution, by which the dynamic, static performance and stability of the whole xy precision positioning platform was looked after for improvement and the error was decreased, was achieved via the optimal and innovative design of the mechanical structure of xy precision positioning platform of wire bonders. The test results, which acquired by the research and comparative analysis of performance testing on the control system of the xy precision positioning platform of wire bonders after optimized, prove the correctness of the optimization analysis method.