Abstract:The problem of static performance for the hydrostatic sliding guideways of the ultraprecision hydrostatic positioning table was studied. Based on the hydro-lubrication theory and the Reynolds equations, the mathematical physics model of the oil film pressure of guideways was built. Finite element analysis (FEA) method was applied to solve each parameter of the static performances of the hydrostatic guideway, such as bearing capacity, static stiffness and flux, and etc. By using three dimensional (3-D) modeling Solidworks and the CFD software FLUENT, a comprehensive analysis was conducted on the hydrostatic guideways from the 3-D structure modeling design and interior 3-D flow, so as to achieve the contour band and curves of the pressure distribution of the oil film as well as the hydraulic oil flow velocity distribution of the oil curve. Moreover the influences of the design parameters of different design and the environmental parameters on the static performance of the hydrostatic guideways were analyzed. This study result therefore is instructive for the design of the actual hydrostatic guideway system.