In order to improve the accuracy of machine tool, some temperature sensors were used by acquiring its key point temperature,by taken 〖BF〗ARM11_Linux〖BFQ〗 development board as the main body,embedded in Multiple Linear Regression algorithm, research was conducted of realtime thermal error compensation of Fanuc machine tool spindle. Three modules were designed: the temperature acquisition analysis module, the thermal error modeling and realtime compensation module, and the receiving data module of machine tool.The S3C6410 development board was transplanted into QT interface，and the favorable human０machine interface (MMI) was convenient to monitor dynamic data. The experiment proves that realtime compensation controller confirms the feasibility, and achieves good results. 