In order to obtain the relationship between the preparation parameters using micro abrasive waterjet and the preparation tool edge radius,considering the water jet pressure,traverse speed,abrasive flow rate,abrasive grit size and standoff distance of five main influencing parameters of the preparation tool edge radius,test was designed using orthogonal experimental design method .Variance analysis of the test results was carried out and regression model was established using MATLAB software,the influence of mainpassivation parameters and regression model tool edge radius was got.The research results show that abrasive flow rate,traverse speed and abrasive grit size is the main factor affecting the tool edge radius,and the water jet pressure and standoff distance has little influence on the value,may be due to too dense to lead.By the regression analysis the prediction model can predict tool edge radius of good value,and the maximum relative error is less than 759%.