The working principles of vacuum suction guide were introduced. Aiming at the problems of drift and movement instability during the working process of precision machine tools in open static pressure mode, a new vacuum suction static pressure supporting technique that combining vacuum suction generator with flow rate controller of pinhole throttle was introduced. The computation model of vacuum suction guide was established. Also the gas film stiffness was analyzed and calculated. The air film thickness and stiffness of opentype static pressure guide were ensured. Also this technique was applied to machine tool guide. The application shows that the motion accuracy of machine tools, as well as the machining accuracy of work piece is improved.