Thermal deformation depends on the factors as shape, material, and surface residual stress of machine parts, and etc. Based on the principle of engineering elastic mechanics and thermodynamics, the influence of residual stress on thermal deformation produced during fineturning of the inner ring of the main bearing shaft for wind turbine was analyzed with an aim. Quantitative analysis was carried out on radial deformation produced by residual stress in machining, and a mathematical model of thermal deformation of shaft and sleeve parts based on residual stress was established and was verified through theoretical calculation and experimental tests. The mathematical model of thermal deformation of shaft and sleeve parts is verified, which results are in good agreement with the mathematical model.