Based on the different characteristics of the serial mechanism and parallel mechanism and the excellent control characteristics of the servo motor, a series-parallel hybrid five degrees of freedom (5-DOF) motion platform is designed. Through the dynamic analysis of the parallel mechanism, a normal solution of geometric algorithm for 3-RPS parallel mechanism was proposed. A control system based on C# language was designed, and the hardware and software of the system were introduced. The control system could realize the precise control in the movement range of the platform. Test results show that the translational platform positioning accuracy is better than 10 μm and rotation positioning accuracy is better than 0.01°.