Abstract:The design of micro ultrasonic machining machine tool includes a hardware design and a motion control system design, the motion control system is the key component of the machine tool, which directly or indirectly affects the machining quality and machining efficiency. Hardware design structure with macro and micro composite can effectively ensure motion control precision. Based on LabVIEW software, a motion control system for micro ultrasonic machining is developed, which was aimed to the precision micro three-dimensional (3D) motion platform. The system was comprised of a initialization module, a crude tool setting module, a precise tool setting module, an absolute coordinate real-time indication module, a data acquisition module and a machining control module, and etc. Closed-loop control structured of the real time machining force by micro tool combining with the motion of the the micro 3D platform could effectively realize the precise tool setting and feed machining with constant force. Finally, the motion control system is tested, which in order to study the relationship between the constant force control range and incremental displacement, feed speed, and retraction speed.