航空科学基金资助项目(2013ZE54002)
王明海,张枢南,邵晨峰,庒鑫,张志勇.工艺参数对单晶硅超精密加工切削力的影响[J].机床与液压,2017,45(19):45-48.
. Effect of Technological Parameters on Cutting Force of Single Crystal Silicon in Ultra -precision Machining[J]. Machine Tool & Hydraulics,2017,45(19):45-48