Elastic modulus is an important parameter of material properties.The effects of contact depth and initial unloading slope on the elastic modulus are larger when Oliver-Pharr method is used,especially when surface material piling up at the contact edge.Using dimensional analysis and finite element simulation,the analytical relationship of the elastic modulus and indentation parameters was established.The results of the numerical reverse analysis and experiments show that using the proposed method,high precision elastic modulus can be obtained,the elastic modulus high efficiency measurement is achieved,and the testing cost is reduced.