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精密定位用螺杆式压电位移执行器研究
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Studies on Screw-Type Piezoelectric Displacement Actuator for Precise Positioning
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    摘要:

    为了掌握柔性铰链、螺杆滑轨、夹持力机构的相互关系,基于惯性黏滑位移原理,制作一种螺杆旋转步进驱动的压电位移执行器。采用有限元仿真计算对柔性铰链及夹持机构进行设计分析。施加单向锯齿波信号,在频率低于500 Hz时,该执行器位移输出速率稳定;前进、后退速率随频率和电压增大而线性增大,500 Hz/48 V下,前进、后退速率分别为11.51 μm/s和7.98 μm/s,平均步长分别为23 nm和16 nm;长行程往复循环运动时,前进、后退速率相对误差分别为12.85%、4.21%,具有良好的位移稳定性。

    Abstract:

    In order to master the relationship between flexible hinge,screw rail and clamping force mechanism,a screw-type piezoelectric displacement actuator based on the inertia stick-slip principle was fabricated.The flexure hinges and clamping mechanism were designed and analyzed by finite-element analysis simulation.Applying a unidirectional sawtooth signal to the actuator,its displacement output velocity keeps stable when the frequency is below 500 Hz.The forward and backward velocities increase almost linearly with the increase of frequency and voltage.The forward and backward velocities are 11.51 μm/s and 7.98 μm/s,respectively,and the average step lengths are 23 nm and 16 nm,respectively,as the driving voltage is 48 V and the frequency is 500 Hz.The relative errors of forward and backward velocities are 12.85% and 4.21% respectively in large-stroke repeated motion,showing good displacement stability.

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辜俊,凌志远.精密定位用螺杆式压电位移执行器研究[J].机床与液压,2024,52(8):81-85.
GU Jun, LING Zhiyuan. Studies on Screw-Type Piezoelectric Displacement Actuator for Precise Positioning[J]. Machine Tool & Hydraulics,2024,52(8):81-85

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  • 在线发布日期: 2024-04-29
  • 出版日期: 2024-04-28