The presence of non-ideal torque harmonics during servo motor operation significantly restricts the machining performance of CNC machine tools, primarily due to inverter nonlinearity. Thus, it is crucial to research high-performance inverter nonlinear compensation strategies to enhance CNC machine tool machining performance. This paper addresses the limitations of traditional methods in considering all inverter nonlinearity factors by proposing an accurate error voltage calculation method based on phase current estimation lookup tables. Considering various nonlinear factors such as inverter turn-off/on delays, dead time, and parasitic capacitance, the error voltage lookup table is generated using filtered current commands. This method effectively mitigates interference from harmonic introduction by feedback current and current clamping. Experimental results demonstrate the superior compensation effects achieved by the algorithm proposed in this paper compared to traditional strategies.